ASTM F1238-95(2011)

ASTM F1238-95(2011)

Name in English:
ASTM F1238-95(2011)

Name in Russian:
ASTM F1238-95(2011)

Description in English:
Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications

Description in Russian:
Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications

Document status:
Active

Format:
Electronic (PDF)

Page count:
3

Delivery time (for English version):
1 business day

Delivery time (for Russian version):
2 business days

SKU:
ASTM10586

Choose Document Language:
$8
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