Name in English:
IEC 62047-10:2011
Name in Russian:
МЭК 62047-10:2011
Description in English:
Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials
Description in Russian:
Полупроводниковые приборы. Микро-электромеханические приборы. Часть 10. Испытание на сжатие микро - колонн для материалов MEMS
Document status:
Active
Format:
Electronic (pdf/doc)
Page count:
26
Delivery time (for English version):
1 business day
Delivery time (for Russian version):
3 business days
SKU:
IEC013059
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