IEC 62047-11:2013

IEC 62047-11:2013

Name in English:
IEC 62047-11:2013

Name in Russian:
МЭК 62047-11:2013

Description in English:
Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems

Description in Russian:
Полупроводниковые приборы. Микроэлектромеханические приборы. Часть 11. Метод испытания на коэффициенты линейного теплового расширения автономного материала для микроэлектромеханических систем

Document status:

Electronic (PDF)

Page count:

Delivery time (for English version):
1 business day

Delivery time (for Russian version):
6 business days


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