IEC 62047-16:2015

IEC 62047-16:2015

Name in English:
IEC 62047-16:2015

Name in Russian:
МЭК 62047-16:2015

Description in English:
Semiconductor devices - Micro-electromechanical devices - Part 16: Test methods for determining residual stresses of MEMS films - Wafer curvature and cantilever beam deflection methods

Description in Russian:
Приборы полупроводниковые. Микроэлектромеханические приборы. Часть 16. Методы определения остаточных напряжений в пленках MEMS. Методы определения отклонения консольной балки и кривизны пластины

Document status:

Electronic (PDF)

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Delivery time (for English version):
1 business day

Delivery time (for Russian version):
3 business days


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