IEC 62047-17:2015

IEC 62047-17:2015

Name in English:
IEC 62047-17:2015

Name in Russian:
МЭК 62047-17:2015

Description in English:
Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films

Description in Russian:
Приборы полупроводниковые. Микроэлектромеханические приборы. Часть 17. Метод испытания на вспучивание для измерения механических свойств тонких пленок

Document status:

Electronic (PDF)

Page count:

Delivery time (for English version):
1 business day

Delivery time (for Russian version):
6 business days


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