IEC 62047-21:2014

IEC 62047-21:2014

Name in English:
IEC 62047-21:2014

Name in Russian:
МЭК 62047-21:2014

Description in English:
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials

Description in Russian:
Приборы полупроводниковые. Микроэлектромеханические приборы. Часть 21. Метод определения коэффициента Пуассона тонкопленочных MEMS материалов

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Electronic (PDF)

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Delivery time (for English version):
1 business day

Delivery time (for Russian version):
3 business days


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