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Semiconductor devices. Micro-electromechanical devices - Terms and definitions. Original standard BS EN 62047-1-2016 in PDF full version. Additional info + preview on request

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Semiconductor devices. Micro-electromechanical devices - Micro-pillar compression test for MEMS materials. Original standard BS EN 62047-10-2011 in PDF full version. Additional info + preview on request

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Semiconductor devices. Micro-electromechanical devices - Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems. Original standard BS EN 62047-11-2013 in PDF full version. Additional info + preview on request

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Semiconductor devices. Micro-electromechanical devices - Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures. Original standard BS EN 62047-12-2011 in PDF full version. Additional info + preview on request

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Semiconductor devices. Micro-electromechanical devices - Bend-and shear-type test methods of measuring adhesive strength for MEMS structures. Original standard BS EN 62047-13-2012 in PDF full version. Additional info + preview on request

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Semiconductor devices. Micro-electromechanical devices - Forming limit measuring method of metallic film materials. Original standard BS EN 62047-14-2012 in PDF full version. Additional info + preview on request

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