St IEC 62047-3:2006

St IEC 62047-3:2006

Name in English:
St IEC 62047-3:2006

Name in Russian:
Ст МЭК 62047-3:2006

Description in English:
Semiconductor devices - Micro-electromechanical devices - Part 3: Thin film standard test piece for tensile testing

Description in Russian:
Полупроводниковые приборы. Микро-электромеханические приборы. Часть 3. Тонкопленочные стандартные образцы для испытаний на растяжение

Document status:

Electronic (PDF)

Page count:

Delivery time (for English version):
1 business day

Delivery time (for Russian version):
3 business days


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