IEC 62047-4-2026 PDF

Full title and description

Semiconductor devices — Micro‑electromechanical devices — Part 4: Generic specification for MEMS (IEC 62047-4:2026). This part provides a generic specification and quality‑assessment framework for MEMS made by semiconductor and related micromachining technologies, and establishes general principles for describing and testing electrical, optical, mechanical and environmental characteristics of MEMS devices.

Abstract

IEC 62047-4:2026 is a generic MEMS specification intended to support the preparation of device‑specific standards and quality assessment systems. It covers general procedures for material characterization, handling, assembly, process control, and measurement methods, and it sets out principles for qualification, capability approval and testing across a broad range of MEMS applications. The 2026 edition expands the scope compared with the previous edition.

General information

• Status: International Standard (published).
• Publication date: January 7, 2026.
• Publisher: International Electrotechnical Commission (IEC).
• ICS / categories: 31.080.99 (Semiconductor devices; MEMS).
• Edition / version: 2.0 (2026 edition).
• Number of pages: 19.

Key bibliographic facts above are taken from the IEC publication record for IEC 62047-4:2026.

Scope

IEC 62047-4:2026 specifies generic requirements and quality‑assessment principles for micro‑electromechanical systems produced by semiconductor‑based micromachining technologies. The 2026 edition explicitly broadens application coverage to include optical MEMS, bio‑MEMS, micro‑TAS and power MEMS in addition to sensors and RF MEMS, and it clarifies applicability to MEMS using non‑semiconductor materials (polymers, glass, metals, ceramics) where relevant. The edition also updates MEMS category tables and adds application sectors such as consumer electronics and automotive.

Key topics and requirements

• Generic device description and categorization for MEMS types and application sectors (including sensors, RF MEMS, optical MEMS, bio‑MEMS, micro‑TAS, power MEMS).
• Principles for quality assessment: qualification, capability approval, lot formation, subcontracting and traceability.
• General testing principles for electrical, optical, mechanical and environmental characteristics and references to standardized environmental tests.
• Guidance on material characterization, specimen handling, measurement methods and process control relevant to MEMS production.
• Requirements and recommendations to support the drafting of device‑specific standards and use within quality systems (for example IECQ/CECC assessments).

Typical use and users

Used by MEMS device manufacturers, quality and reliability engineers, test laboratories, standards developers, procurement/specification writers and certification/assessment bodies. Typical uses include establishing supplier quality criteria, preparing device‑specific test plans, harmonizing test and qualification methods across product families, and supporting regulatory or procurement specifications.

Related standards

IEC 62047 is a multipart series addressing MEMS measurement and test methods. Relevant parts to consult alongside Part 4 include Part 1 (Terms and definitions) and several test‑method parts such as Parts 6, 7, 8, 9, 10, 11, 12, 13, 14, 18 and 19 among others in the IEC 62047 series; device‑specific standards and IEC 60068 (environmental testing) and IEC 60749 families are also commonly referenced.

Keywords

MEMS, micro‑electromechanical systems, generic specification, quality assessment, qualification, testing methods, semiconductor devices, micromachining, material characterization, RF MEMS, optical MEMS, bio‑MEMS.

FAQ

Q: What is this standard?

A: IEC 62047-4:2026 is the international generic specification for MEMS, providing overarching quality assessment principles and general testing/descriptive guidance for MEMS products and for the development of device‑specific standards.

Q: What does it cover?

A: It covers generic specification topics — categorization, material and process considerations, test and measurement principles for electrical/optical/mechanical/environmental characteristics, and procedures for qualification and capability approval. The 2026 edition extends scope to include optical MEMS, bio‑MEMS, micro‑TAS and power MEMS.

Q: Who typically uses it?

A: Manufacturers, QA/reliability engineers, test houses, standards committees, procurement teams and assessment/certification bodies use this standard to define quality criteria, test plans and to harmonize specifications across MEMS product lines.

Q: Is it current or superseded?

A: IEC 62047-4:2026 is the current published edition (Edition 2.0, published January 7, 2026). It supersedes the earlier edition (IEC 62047-4:2008) and includes scope and content updates.

Q: Is it part of a series?

A: Yes — IEC 62047 is a multipart series on micro‑electromechanical devices (MEMS). Part 4 is the generic specification; other parts provide terms and definitions and specific test methods for MEMS materials and devices.

Q: What are the key keywords?

A: MEMS, generic specification, quality assessment, testing, qualification, micromachining, semiconductor devices, material characterization, RF MEMS, optical MEMS.