BS EN 62047-5-2011 (2012) PDF

Full title and description

STB BS EN 62047-5-2011 (2012) — Semiconductor devices. Micro-electromechanical devices. Part 5: RF MEMS switches. This document is the British/European adoption of IEC 62047-5:2011 and defines terminology, definitions, symbols and test methods used to evaluate the essential ratings and characteristic parameters of radio‑frequency micro‑electro‑mechanical (RF MEMS) switches.

Abstract

This standard specifies vocabulary, measurement procedures and test methods for RF MEMS switches (including series and shunt configurations, galvanic and capacitive contacts and a variety of actuation mechanisms such as electrostatic, electro‑thermal, electromagnetic and piezoelectric). It provides methods to determine key RF and mechanical characteristics (for example insertion loss, isolation, return loss, switching voltage, switching time, contact resistance, lifetime and environmental robustness) and is intended to support consistent evaluation and reporting of device performance. The published IEC version includes a corrigendum dated March 2012.

General information

• Status: Published / active (identical/adopted national implementations exist).
• Publication date: Original IEC publication: 13 July 2011; Corrigendum issued 8 March 2012; national/BS EN adoption and publication dates vary (national BS EN edition published by BSI in 2013).
• Publisher: Base document published by the International Electrotechnical Commission (IEC); national adoption and sale as BS EN issued by the British Standards Institution (BSI).
• ICS / categories: 31.080.99 — Other semiconductor devices / MEMS and micro‑electromechanical systems.
• Edition / version: IEC edition 1.0 (2011) with Corrigendum 1 (2012); national BS EN edition corresponds to the EN adoption of IEC 62047‑5:2011/COR1:2012.
• Number of pages: IEC bilingual edition: 69 pages (English/French); national BS EN/English-only publication listings show approximately 38 pages for the BS EN publication.

Scope

IEC/EN 62047-5 defines the terms, symbols and test procedures used to evaluate RF MEMS switches and to determine their essential ratings and characteristic parameters. It is applicable to RF MEMS switches regardless of structural design (series or shunt), contact type (d.c. contact or capacitive contact), switching network configuration (SPST, SPDT, DPDT, etc.) or actuation mechanism (electrostatic, electro‑thermal, electromagnetic, piezoelectric, and others). The standard is intended to provide a uniform basis for characterizing device RF performance, switching characteristics and reliability under specified test conditions.

Key topics and requirements

• Definitions and terminology specific to RF MEMS switches (symbols, parameters and units).
• Standardized test methods for RF performance: insertion loss, isolation, return loss and frequency response.
• Electrical and switching characteristics: actuation (pull‑in) voltage, release voltage, switching time, contact resistance (for galvanic contacts) and capacitance (for capacitive contacts).
• Mechanical and reliability tests: cycle life (switching endurance), stiction measurement, contact wear, mechanical shock and vibration tests.
• Environmental and stress tests: temperature, humidity, thermal cycling, and other relevant environmental conditions for MEMS devices.
• Requirements for test sample preparation, measurement setup, instrumentation, test reporting and data presentation to ensure repeatability and comparability of results.
• Guidance on applicability to different switch configurations and actuation mechanisms, and on interpretation of measured parameters for device comparison and specification.

Typical use and users

Primary users include RF MEMS device designers and manufacturers, RF systems engineers, test and qualification laboratories, research organizations developing MEMS switch technology, and procurement/specification engineers who require standardized performance metrics for sourcing and acceptance. The standard is also used by standards committees, certification bodies and academic groups studying RF MEMS behavior and reliability. The IEC text highlights applications such as multi‑band mobile terminals, reconfigurable RF subsystems, radar microsystems, software defined radios and satellite communications.

Related standards

IEC 62047 is a multi‑part series covering MEMS device types and test methods (other parts cover different MEMS test methods and device classes). Corrigenda and related parts (for example other parts in the 62047 series covering film stress tests, filters/duplexers, gyroscopes and other MEMS device measurements) should be consulted for complementary procedures and cross‑references. National adoptions (EN/BS EN) are published by member bodies and may include identical text plus national forewords.

Keywords

RF MEMS, MEMS switches, semiconductor devices, micro‑electromechanical systems, test methods, insertion loss, isolation, switching voltage, switching time, contact resistance, reliability, environmental testing, IEC 62047.

FAQ

Q: What is this standard?

A: It is the IEC technical standard (adopted as EN/BS EN) that defines terminology and test methods for radio‑frequency micro‑electro‑mechanical switches (RF MEMS switches). It establishes standardized measurements to evaluate RF and mechanical performance and reliability.

Q: What does it cover?

A: It covers definitions, symbols and standardized test procedures for characterizing RF parameters (insertion loss, isolation, return loss), switching/electrical characteristics (actuation voltage, switching time, contact resistance/capacitance) and reliability/environmental behavior (endurance, stiction, thermal and humidity tests), applicable to a wide range of RF MEMS switch designs.

Q: Who typically uses it?

A: MEMS device designers and manufacturers, RF engineers, test laboratories and researchers use this standard to measure, report and compare RF MEMS switch performance; standards bodies and procurement/specification teams also reference it.

Q: Is it current or superseded?

A: The IEC base publication is IEC 62047‑5:2011 (Edition 1.0) and a Corrigendum was issued in March 2012. The IEC entry lists a stability date (planned review/successor) consistent with the IEC publication record; users should check their national standards body for the latest national adoption status or any subsequent amendments.

Q: Is it part of a series?

A: Yes — IEC 62047 is a multipart series addressing micro‑electromechanical devices and test methods for MEMS; Part 5 is the RF MEMS switches part, and other parts in the series cover different MEMS device types and measurement techniques.

Q: What are the key keywords?

A: RF MEMS, MEMS switch, insertion loss, isolation, return loss, actuation voltage, switching time, contact resistance, endurance, stiction, IEC 62047.