PD ISO TS 20175-2018 PDF

Full title and description

Vacuum technology — Vacuum gauges — Characterization of quadrupole mass spectrometers for partial pressure measurement. This technical specification defines procedures to characterize quadrupole mass spectrometers (QMS) with electron‑impact ionization for measurement of atomic mass‑to‑charge ratios m/z < 300, covering calibration, performance parameters and recommended measurement procedures for vacuum and partial‑pressure applications.

Abstract

This document describes procedures to characterize QMS instruments (electron impact ionization, m/z < 300) for uses such as continuous leak monitoring, tracer‑gas leak‑rate measurement, residual gas analysis and outgassing rate measurement. It specifies which metrological parameters to assess, recommends preferred measurement modes (scan mode vs trend mode) and explains both traceable laboratory calibration and in‑situ checks and calibrations needed because QMS sensitivity and related parameters can be unstable. The specification excludes QMS with other ion sources (chemical, photo‑ionization, field ionization), instruments using differential pumping that extend operation above 1 Pa, and does not prescribe manufacturer initial adjustment procedures.

General information

• Status: Published.
• Publication date: April 2018 (Edition 1, 2018‑04).
• Publisher: International Organization for Standardization (ISO).
• ICS / categories: 23.160 — Vacuum technology.
• Edition / version: Edition 1 (2018).
• Number of pages: 23 pages (official ISO listing).

Scope

The specification applies to characterization of quadrupole mass spectrometers that use electron‑impact ionization and are intended for measuring atomic mass‑to‑charge ratios below m/z 300. It provides procedures to determine metrological performance (sensitivity, resolution, minimum detectable partial pressure/concentration, dynamic range, linearity, fragmentation patterns, minimum detectable partial pressure, detection limits, and parameters relevant to leak and outgassing measurements). It is not applicable to QMS using other ionization methods, QMS with differential‑pumping designs intended for pressures above 1 Pa, nor to manufacturer‑specific initial alignment procedures. Users are expected to be familiar with QMS operation and high/ultra‑high vacuum techniques.

Key topics and requirements

• Characterization procedures for QMS performance parameters: mass resolution, sensitivity, dynamic range, linearity, minimum detectable partial pressure (MDPP) and minimum detectable concentration (MDC).
• Specification of fragmentation (cracking) patterns and interference effects, and guidance on relative sensitivity factors.
• Recommended measurement modes and data acquisition approaches (scan mode preferred; caution about trend mode peak‑shift effects).
• Calibration approaches: SI‑traceable calibration in calibration laboratories or NMIs and procedures for frequent in‑situ checks and recalibration to maintain accuracy.
• Practical limits and exclusions: applies only to electron‑impact QMS for m/z < 300, excludes other ion sources and differential‑pumping QMS with inlet pressure > 1 Pa.
• Applications covered: continuous leak monitoring, tracer‑gas leak‑rate measurements, residual gas analysis (RGA) and outgassing rate measurements.

Typical use and users

Intended users include vacuum technologists, manufacturers and service engineers of QMS instruments, calibration and testing laboratories, national metrology institutes (NMIs), research laboratories, semiconductor/process engineers and facilities performing leak detection, residual gas analysis or outgassing studies. The document is used both to set up characterization/calibration procedures and to define performance checks for in‑service instruments.

Related standards

Normative and related documents typically referenced with ISO/TS 20175: ISO 3567 (vacuum gauges — calibration by direct comparison), ISO 14291 (vacuum gauges — definitions and specifications for quadrupole mass spectrometers) and ISO/IEC Guide 98‑3:2008 (GUM: guide to the expression of uncertainty in measurement). Other related vacuum‑technology standards and vocabulary documents (e.g., ISO 3529, ISO 10012 and national standards such as DIN 28410) are often used in conjunction with this specification.

Keywords

quadrupole mass spectrometer; QMS; vacuum gauges; partial pressure; residual gas analysis; RGA; leak detection; outgassing; calibration; SI traceability; electron impact ionization; MDPP; sensitivity; mass resolution.

FAQ

Q: What is this standard?

A: ISO/TS 20175:2018 is a technical specification that defines procedures to characterize quadrupole mass spectrometers used for partial‑pressure measurement in vacuum technology (electron‑impact ionization, m/z < 300).

Q: What does it cover?

A: It covers metrological characterization (sensitivity, resolution, detection limits, linearity, fragmentation patterns, dynamic range), measurement modes, calibration approaches (laboratory SI‑traceable and in‑situ checks) and recommended procedures for leak monitoring, tracer‑gas leak‑rate testing, RGA and outgassing measurements. It excludes QMS with non‑electron‑impact ion sources and differential‑pumping designs intended to operate with inlet pressures > 1 Pa.

Q: Who typically uses it?

A: Calibration laboratories, NMIs, instrument manufacturers and service engineers, vacuum system operators, research labs and industries requiring accurate residual gas or leak measurements (e.g., semiconductor fabrication, vacuum processing, analytical labs).

Q: Is it current or superseded?

A: As published by ISO in April 2018, ISO/TS 20175:2018 is the first edition (technical specification). Its official status on the ISO listing is "Published" and it is subject to ISO periodic review cycles; users should check with their national standards body or ISO catalog for the latest confirmation or any amendments.

Q: Is it part of a series?

A: It is part of ISO/TC 112 (vacuum technology) deliverables and is related to other vacuum‑gauge and QMS standards such as ISO 14291 and ISO 3567; it complements vocabulary, calibration and uncertainty guidance used across the vacuum metrology series.

Q: What are the key keywords?

A: Quadrupole mass spectrometer, QMS, vacuum gauges, partial pressure, residual gas analysis, leak detection, calibration, MDPP, electron impact ionization, SI traceability.