ASTM F388-84 PDF
Name in English:
St ASTM F388-84
Name in Russian:
Ст ASTM F388-84
Description in English:
Method for Measurement of Oxide Thickness on Silicon Wafers and Metallization Thickness by Multiple-Beam Interference (Tolansky Method) (Withdrawn 1993). Original standard ASTM F388-84 in PDF full version. Additional info + preview on request
Description in Russian:
Метод измерения толщины оксида на кремниевых пластинах и толщины металлизации методом многолучевой интерференции (метод Толанского) (отменён в 1993 г.). Оригинальный стандарт ASTM F388-84 в PDF полная версия. Дополнительная инфо + превью по запросу
Document status:
Withdrawn
Format:
Electronic (PDF)
Page count:
6
Delivery time (for English version):
1 business day
Delivery time (for Russian version):
2 business days
SKU:
stastm17589
More technical details are being prepared for this document.