GOST 25196-82

GOST 25196-82

Name in English:
GOST 25196-82

Name in Russian:
ГОСТ 25196-82

Description in English:
Vacuum equipment. Apparatus for ion implantation. General technical requirements

Description in Russian:
Оборудование вакуумное. Установки для ионной имплантации. Общие технические требования

Document status:

Electronic (pdf/doc)

Page count:

Delivery time (for English version):
2 business days

Delivery time (for Russian version):
1 business day


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