State system for ensuring the uniformity of measurements. Reflectometers of the extreme ultraviolet radiation for measurements of the characteristics of multilayer nanostructures in the wavelength range 10 to 30 nm. Procedure of measurements

Description in Russian:
Государственная система обеспечения единства измерений. Рефлектометры экстремального ультрафиолетового излучения для измерений характеристик многослойных наноструктур в диапазоне длин волн от 10 до 30 нм. Методика измерений

Document status:

Active

Format:

Electronic (PDF)

Page count:

Delivery time (for English version):

2 business days

Delivery time (for Russian version):

1 business day

SKU:

GOST24446

GOST R 8.716-2010

State system for ensuring the uniformity of measurements. Reflectometers of the extreme ultraviolet radiation for measurements of the characteristics of multilayer nanostructures in the wavelength range 10 to 30 nm. Procedure of measurements

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