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Semiconductor devices. Micro-electromechanical devices - Gyroscopes. Original standard BS EN 62047-20-2014 in PDF full version. Additional info + preview on request

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Semiconductor devices. Micro-electromechanical devices - Test method for Poisson's ratio of thin film MEMS materials. Original standard BS EN 62047-21-2014 in PDF full version. Additional info + preview on request

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Semiconductor devices. Micro-electromechanical devices - Electromechanical tensile test method for conductive thin films on flexible substrates. Original standard BS EN 62047-22-2014 in PDF full version. Additional info + preview on request

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Semiconductor devices. Micro-electromechanical devices - Silicon based MEMS fabrication technology. Measurement method of pull-press and shearing strength of micro bonding area. Original standard BS EN 62047-25-2016 in PDF full version. Additional info + preview on request

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Semiconductor devices. Micro-electromechanical devices - Description and measurement methods for micro trench and needle structures. Original standard BS EN 62047-26-2016 in PDF full version. Additional info + preview on request

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Semiconductor devices. Micro-electromechanical devices - Thin film standard test piece for tensile testing. Original standard BS EN 62047-3-2006 in PDF full version. Additional info + preview on request

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