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Semiconductor devices. Micro-electromechanical devices - Generic specification for MEMS. Original standard BS EN 62047-4-2010 in PDF full version. Additional info + preview on request

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Semiconductor devices. Micro-electromechanical devices - RF MEMS switches. Original standard BS EN 62047-5-2011 (2012) in PDF full version. Additional info + preview on request

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Semiconductor devices. Micro-electromechanical devices - Axial fatigue testing methods of thin film materials. Original standard BS EN 62047-6-2010 in PDF full version. Additional info + preview on request

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Semiconductor devices. Micro-electromechanical devices - MEMS BAW filter and duplexer for radio frequency control and selection. Original standard BS EN 62047-7-2011 in PDF full version. Additional info + preview on request

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Semiconductor devices. Micro-electromechanical devices - Strip bending test method for tensile property measurement of thin films. Original standard BS EN 62047-8-2011 in PDF full version. Additional info + preview on request

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Semiconductor devices. Micro-electromechanical devices - Wafer to wafer bonding strength measurement for MEMS. Original standard BS EN 62047-9-2011 (2012) in PDF full version. Additional info + preview on request

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