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Semiconductor devices. Micro-electromechanical devices - MEMS piezoresistive pressure-sensitive device. Original standard BS IEC 62047-33-2019 in PDF full version. Additional info + preview on request

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Semiconductor devices. Micro-electromechanical devices - Test methods for MEMS piezoresistive pressure-sensitive device on wafer. Original standard BS IEC 62047-34-2019 in PDF full version. Additional info + preview on request

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Semiconductor devices. Micro-electromechanical devices - Test method of electrical characteristics under bending deformation for flexible electromechanical devices. Original standard BS IEC 62047-35-2019 in PDF full version. Additional info + preview on request

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Semiconductor devices. Micro-electromechanical devices - Environmental and dielectric withstand test methods for MEMS piezoelectric thin films. Original standard BS IEC 62047-36-2019 in PDF full version. Additional info + preview on request

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Semiconductor devices. Micro-electromechanical devices - Environmental test methods of MEMS piezoelectric thin films for sensor application. Original standard BS IEC 62047-37-2020 in PDF full version. Additional info + preview on request

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Semiconductor devices. Micro-electromechanical devices - Test method for adhesion strength of metal powder paste in MEMS interconnection. Original standard BS IEC 62047-38-2021 in PDF full version. Additional info + preview on request

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